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METHODS OF POLYMERIZING SILANES AND CYCLOSILANES USING N-HETEROCYCLIC CARBENES, METAL COMPLEXES HAVING N-HETEROCYCLIC CARBENE LIGANDS, AND LANTHANIDE COMPOUNDS
METHODS OF POLYMERIZING SILANES AND CYCLOSILANES USING N-HETEROCYCLIC CARBENES, METAL COMPLEXES HAVING N-HETEROCYCLIC CARBENE LIGANDS, AND LANTHANIDE COMPOUNDS
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机译:使用N-杂环碳,具有N-杂环碳液体的金属配合物和镧系元素化合物聚合硅烷和环硅氧烷的方法
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摘要
Compositions and methods for controlled polymerization and/or oligomerization of silane (and optionally cyclosilane) compounds, including those of the general formulae SinH2n and SinH2n+2, as well as halosilanes and arylsilanes, to produce soluble polysilanes, polygermanes and/or polysilagermanes having low levels of carbon and metal contaminants, high molecular weights, low volatility, high purity, high solubility and/or high viscosity. The polysilanes, polygermanes and/or polysilagermanes are useful as a precursor to silicon- and/or germanium-containing conductor, semiconductor and dielectric films.
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