MANUFACTURING METHOD FOR POLYCRYSTAL LEAD TITANATE THICK FILM USING CONSTANT TEMPERATURE EVACUATED POWDER INJECTION AND HYDROTHERMAL SYNTHESIS, AND POLYCRYSTAL LEAD TITANATE THICK FILM MANUFACTURED THEREBY

摘要

The purpose of the present invention is to provide a manufacturing method for a polycrystal lead titanate thick film using constant temperature evacuated powder injection and hydrothermal synthesis, and a polycrystal lead titanate thick film manufactured thereby. The manufacturing method comprises: a step (1) of manufacturing lead titanate (PbTiO_3) powder from titanium oxide (TiO_2) powder and lead oxide (PbO) powder; a step (2) of forming a nucleation layer on a substrate by coating with one method selected from a group comprising a sol-gel method, a constant temperature evacuated powder injection method, a sputtering method, and a chemical vapor deposition method, using the PbTiO_3 powder manufactured in step 1; and a step (3) of growing a lead titanate thick film from the nucleation layer formed in step 2. The polycrystal lead titanate thick film can provide improved crystallizability without additional thermal treatment at high temperatures and can provide improved adhesive and electrical properties, by forming a nucleation layer on a substrate by coating with one method selected from a group comprising a sol-gel method, a constant temperature evacuated powder injection method, a sputtering method, and a chemical vapor deposition method and then growing the thick film. Therefore, when manufacturing an element using the polycrystal film, the element can be used as a basis element for a thin film type dielectric material, a piezoelectric material, a sensor, and an actuator with excellent performance by improving the density of storing electric energy and the reliability of the manufactured element.;COPYRIGHT KIPO 2014