Optimum reaction conditions for lead zirconate titanate thick film deposition by ultrasound-assisted hydrothermal method

摘要

A hydrothermal method can be used to deposit lead zirconate titanate (PZT) films and has several advantages, such as a relatively low reaction temperature and high crystal quality. We developed an ultrasound-assisted hydrothermal method to promote the hydrothermal reactions, which is effective for thick-PZT-film deposition. The first ultrasound-assisted hydrothermal method we developed can synthesize a 7.5 mu m PZT film on a titanium substrate. However, for a much thicker film, repeated depositions were required, and the optimum precursor solution for the first deposition was not suitable for repeated depositions. In this study, we attempted to find the optimum precursor solution for depositing a film of sufficient thickness by repeated depositions. As a result, we were able to synthesize a 23.6 mu m PZT film on second deposition by changing the ratio of zirconium to titanium ions in the precursor solutions. In addition, a transverse effect transducer was fabricated under optimum conditions and its vibration properties were evaluated. (C) 2016 The Japan Society of Applied Physics