In the range of smaller drive voltage than the pull-in voltage, it makes it possible to drive at equal to or more than the moving range as conventional. The electronic element 1 and can move with respect to the section (11, 13), the fixing part (11, 13) and having a movable part 12 is installed, the spring force to return to a given location to take place. Fixing (11, 13) has a first drive electrode 32 and the first signal electrode 34. The movable section 12, the second has a drive electrode 33 and the second signal electrode 31. The first electrostatic force by applying voltage between the first driving electrode 32 and the second drive electrode 33 is generated to counter the spring force. Then, the electrostatic force is the first signal electrode 34 and the first, second to animation in the direction in which the spacing of the second signal electrode 31 is widened first driving electrode 32, second driving electrode 33, the first signal electrode 34 and the second signal can electrode 31 is disposed.
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