DEFECT CANDIDATE SPECIFICATION DEVICE, DEFECT CANDIDATE SPECIFICATION METHOD, DEFECT DETERMINATION DEVICE, DEFECT INSPECTION DEVICE, DEFECT CANDIDATE SPECIFICATION PROGRAM, AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To reduce a processing load in the determination of defects to accurately specify defect candidates.;SOLUTION: A defect candidate specification device includes a defect candidate specification unit 21 that specifies defect candidates in image data, when the number of first closed areas obtained by performing first binarization processing using a first threshold is larger than the number of second closed areas obtained by performing second binarization processing on the basis of a second threshold different from the first threshold, from defect candidate information updated, taking the second closed areas as new defect candidates.;COPYRIGHT: (C)2015,JPO&INPIT