POLISHING AGENT, POLISHING ARTICLE, POLISHING AGENT AEROSOL, POLISHING MEMBER AND METHOD FOR PRODUCING POLISHING AGENT

摘要

PROBLEM TO BE SOLVED: To provide a method for producing an inexpensive polishing agent, polishing article, polishing agent aerosol and polishing member by using fine particles coated with a DLC film.SOLUTION: There is provided a polishing agent having fine particles 53 in which particles 51 having a Vickers hardness of Hv600 or more (preferably 1000 or more) are coated with a DLC film 52. A polishing article comprises the polishing agent and a container for accommodating the polishing agent. A polishing agent aerosol has the polishing agent, a diluent for liquefying the polishing agent and a jetting container in which a propellant is charged. A polishing member is a grinding stone having a bulk obtained by solidifying the fine particles 53 or a polishing disc. The particles having a particle diameter of 0.1 to 100 μm are composed of one selected from AlO, SiO, SiO, SiN, WC, SiC, zircon, glass beads, boron carbide and PMMA and a DLC film is formed by a plasma CVD method using a high frequency of 10 kHz to 1 MHz.