MEMS MEMS Detector module for MEMS Sensor and MEMS Sensor having the same

摘要

the invention of a MEMS sensor according to an embodiment of the detection module and the mass body, The mass and the fixing provided spaced, and with the mass comprises a flexible connecting government, extended the bimin first flexible portion and the first flexible portion above the flexible part the masses and to connect the government and the connection with the mass and the Government and the second hinge comprises a flexible suggesting the displacement of the mass body. ;