METHODS FOR PROCESSING HOLES BY MOVING PRECISELY TIMED LASER PULSES IN CIRCULAR AND SPIRAL TRAJECTORIES

摘要

PROBLEM TO BE SOLVED: To solve the problem of motion constraints impacting the throughput of fine hole processing in high-speed material removal employing a beam positioner for directing a laser beam axis along circular and spiral laser patterns.;SOLUTION: A preferred method of material removal entails causing relative movement between the axis of a beam and a specimen, directing the beam axis at an entry segment acceleration and along an entry trajectory 18 to an entry position 16 within the specimen at which laser beam pulse emissions are initiated, moving the beam axis at a circular perimeter acceleration within the specimen to remove material along a circular segment 20 of the specimen, and setting the entry segment acceleration to less than twice the circular perimeter acceleration.;SELECTED DRAWING: Figure 1B;COPYRIGHT: (C)2016,JPO&INPIT