Ti film-coated glass substrate and the metal film-coated glass substrate using the same, method for producing a metal film-coated glass substrate using a glass substrate and which with the Ti film, and flatness evaluation method of a glass substrate surface

摘要

PROBLEM TO BE SOLVED: To provide a glass substrate with a Ti film in which, when a metal film is accumulated on the glass substrate through the Ti film, growth of a hillock associated with heat treatment hardly occurs.;SOLUTION: A glass substrate 1 with a Ti film includes: a glass substrate 2 in which the Ti film containing Ti as a main component and having a thickness of 10-100 nm is formed on a surface, and a half value width of a Ti(002) peak measured by an X-ray diffraction of the Ti film using a rocking curve method when an X ray is irradiated to the Ti film is at most 8°; and the Ti film 3 formed by sputtering on the glass substrate 2.;COPYRIGHT: (C)2014,JPO&INPIT