OPTICAL PROPERTY ACQUISITION APPARATUS, POSITION MEASURING APPARATUS, DATA AMENDING APPARATUS, OPTICAL PROPERTY ACQUISITION METHOD, POSITION MEASURING METHOD AND DATA AMENDING METHOD

摘要

In a drawing device, a reference image, which is an image of calibration plate, is acquired by an image pickup device (5). In an optical property acquisition device (8), the reference image is memorized by an image memory unit (81). Pixel value distribution of each figure element in the reference image is acquired by a calculating unit (82) while a plurality of coefficients included in model function are determined by an optimal method after modeling as a model function capable of partial differentiation. Then, optical properties of the drawing device (5) are acquired by the optical property acquisition unit (83) based on the pixel value distribution of each figure element. In optical property acquisition device (8), the pixel value distribution of each figure element can be calculated with high precision even if pixel value forming phase of each figure element is small. Consequently, the optical properties of the drawing device (5) have good degree of precision.;COPYRIGHT KIPO 2016