CNT-PZT CNT-PZT MANUFACTURING METHOD OF CNT-PZT NANOCOMPOSITE THIN FIM AND NANOCOMPOSITE THIN FIM THEREBY

摘要

In the present invention, a step of pre-treating carbon nanotubes (CNTs) Dispersing the pretreated CNT in a Pb-Zr-Ti (PZT) precursor sol-gel solution containing lead, zirconium and titanium to obtain a CNT-PZT sol-gel solution and then spin-coating the substrate on the substrate; Drying and pyrolyzing the PZT precursor sol-gel solution coated on the substrate; And thermally treating the PZT synthesized by the pyrolysis under an inert gas to provide a CNT-PZT nanocomposite thin film and a CNT-PZT nanocomposite thin film prepared therefrom. According to the production method of the present invention, the temperature of the heat treatment can be lowered by 100 ° C or more as compared with the conventional method in manufacturing the CNT-PZT composite thin film by the sol-gel method.