CORPUSCULAR BEAM DEVICE AND METHOD FOR OPERATING A CORPUSCULAR BEAM DEVICE

摘要

The present invention relates to a particle beam apparatus and a method of operating a particle beam apparatus. The particle beam device has a column (10) with a particle beam optical system for generating a particle beam in order to expose a desired pattern in an exposure mode in a vacuum sample chamber (20). Via a gas supply system, a regulatable gas stream with photodissociable gas is supplied in a cleaning operation of the column and / or the vacuum sample chamber. By means of several in the column and / or in the vacuum sample chamber spatially distributed light sources (15.1-15.5), the photodissociation of the supplied gas is effected in the cleaning operation. In the cleaning mode, individual light sources can be selectively switched on and off in a time-selective manner via a control unit (30) connected to the light sources in order to specifically purify individual elements in the column and / or in the vacuum sample chamber