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CORPUSCULAR BEAM DEVICE AND METHOD FOR OPERATING A CORPUSCULAR BEAM DEVICE
CORPUSCULAR BEAM DEVICE AND METHOD FOR OPERATING A CORPUSCULAR BEAM DEVICE
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机译:体梁装置和用于操作体梁装置的方法
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摘要
In a particle beam apparatus and a method for operating a particle beam apparatus, the particle beam apparatus has a column having a particle-beam optical system for generating a particle beam, to thereby expose a desired pattern in a vacuum sample chamber in an exposure operation. In a cleaning operation, a regulable gas stream having photodissociatable gas is fed to the column and/or the vacuum sample chamber via a gas-feed system. The photodissociation of the supplied gas is brought about in the cleaning operation with the aid of a plurality of light sources distributed spatially in the column and/or in the vacuum sample chamber. In the cleaning operation, individual light sources are able to be switched on and off selectively with respect to time via a control unit connected to the light sources, in order to clean individual elements in the column and/or in the vacuum sample chamber in targeted fashion.
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