MULTI-ELEMENT SIMULTANEOUS TYPE FLUORESCENT X-RAY ANALYZER AND MULTI-ELEMENT SIMULTANEOUS FLUORESCENT X-RAY ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a multi-element simultaneous type fluorescent X-ray analyzer, etc. that can precisely correct a background even if a notch part is formed at a sample table.SOLUTION: A multi-element simultaneous type fluorescent X-ray analyzer according to the invention comprises: a sample table 2 where a sample 1 is placed; a carrier arm 22 for the sample 1; a stage 11 that moves the sample table 2; and an X-ray source 8 that emits a primary X-ray 7. The sample table 2 has a notch part 2e formed for allowing the carrier arm 22 to pass through in a vertical direction. Background correction means 21 preliminarily stores intensity for each measurement point Pin a blank wafer 1b after subtracting measured intensity at a reference measurement point Pon the notch part 2e from measured intensity at the measurement point P, as background intensity at the measurement point P, and performs correction for each measurement point Pin an analysis object sample 1a after subtracting the background intensity at the measurement point Pfrom the measured intensity at the measurement point P.SELECTED DRAWING: Figure 1