The simultaneous multi-element XRF analysis apparatus of the present invention includes a sample stage 2 on which a sample 1 is placed, a transfer arm 22 of the sample 1, and a stage for moving the sample stage 2 And an X-ray source 8 for irradiating the primary X-ray 7 and a cutout 2e for passing the carrier arm 22 in the vertical direction is formed on the sample stage 2 And the background correction means 21 subtracts the measurement intensity of the reference measurement point P0 on the cutout 2e from the measurement intensity of the measurement point Pn with respect to each measurement point Pn on the blank wafer 1b The intensity of the measurement point Pn is stored in advance as the background intensity of the measurement point Pn and the background intensity of the measurement point Pn is subtracted from the measurement intensity of the measurement point Pn for each measurement point Pn in the sample 1a to be analyzed, do.
展开▼
