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Method for forming conformal carbon films, structures conformal carbon film, and system of forming same
Method for forming conformal carbon films, structures conformal carbon film, and system of forming same
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机译:保形碳膜的形成方法,结构保形碳膜及其形成系统
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摘要
Methods of forming carbon films, structures and devices including the carbon films, and systems for forming the carbon films are disclosed. A method includes depositing a metal carbide film using atomic layer deposition (ALD). Metal from the metal carbide film is removed from the metal carbide film to form a carbon film. Because the films are formed using ALD, the films can be relatively conformal and can have relatively uniform thickness over the surface of a substrate.
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