PIEZORESISTIVE ACCELEROMETER AND METHOD FOR PACKAGING PIEZORESISTIVE ACCELEROMETER

摘要

A piezoresistive accelerometer according to an embodiment comprises: a support; a mass connected to the support so as to be movable by external force; a plurality of piezoresistors disposed between the support and the mass so as to be deformed by a movement of the mass; and a connecting part disposed between the support and the mass so as to allow the mass to rotate with respect to the support, wherein the plurality of piezoresistors are tensioned or compressed by a rotation of the mass about the connecting part, which can cause resistance changes in the plurality of piezoresistors.