PIEZORESISTIVE ACCELEROMETER AND PACKAGING METHOD FOR PIEZORESISTIVE ACCELEROMETER

摘要

According to an embodiment of the present invention, a piezoresistive accelerometer comprises: a support; a mass connected to the support and movable by an external force; a plurality of piezoresistors disposed between the support and the mass, and deformed by a movement of the mass; and a connecting part disposed between the support and the mass to allow rotation of the mass with regard to the support, wherein the plurality of piezoresistors are stretched or compressed by rotation of the mass around the connecting part to cause a change in resistance in the plurality of piezoresistors. Accordingly, the present invention is able to be suitable for various impact ranges by controlling a size of the mass and a thickness of the connecting part.