COMPOUND FOR FORMING ORGANIC FIRM COMPOSITION FOR FORMING ORGANIC FIRM METHOD FOR FORMING ORGANIC FIRM AND PATTERNING PROCESS

摘要

[PROBLEMS] To provide a compound for forming an organic film which gives a composition for forming an organic film having a high level of embedding / planarizing property. A compound for forming an organic film, which has a minimum complex viscosity of 10 Pa · s or less as measured in a range of 50 ° C to 300 ° C.