Method for in-situ characterization of a layer and sensor arrangement to be deposited on a substrate

摘要

The invention relates to a method for in-situ characterization of a layer to be deposited on a substrate, wherein: the layer (3) is deposited between two electrodes (2) of a capacitive sensor on a substrate (1) and at least one electronic property of the deposited layer during the growth of the layer on the substrate is determined by the capacitive sensor.