GRAPHENE-ENHANCED SECONDARY ION MASS SPECTROSCOPY ANALYSIS

摘要

The present invention is related to a method of analysing a solid substrate by means of Secondary lon Mass Spectroscopy (SIMS) comprising the steps of providing a graphene layer over the substrate surface, sputtering of the graphene-coated substrate in a dynamic mode (dSIMS), and detecting and analyzing ejected secondary anions by mass spectrometry analysis. The method according to the invention is useful for characterising surfaces, 2D materials, ultra-thin films, 2D and 3D imaging, depth profiling and concentration analysis, preferably for determining concentration of trace elements in a thin support.