PLASMA CONE FOR INDUCTIVELY COUPLED PLASMA MASS ANALYSER, INDUCTIVELY COUPLED PLASMA MASS ANALYSER, AND MANUFACTURING METHOD OF PLASMA CONE FOR INDUCTIVELY COUPLED PLASMA MASS ANALYSER

摘要

PROBLEM TO BE SOLVED: To provide a plasma cone capable of reducing impurity background and further improving durability without sacrificing sensitivity (ionic intensity), an inductively coupled plasma mass analyser including the plasma cone, and a manufacturing method of the plasma cone.SOLUTION: A sampling cone 14 and a skimmer cone 16 serving as plasma cone included in an interface part of the inductively coupled plasma mass analyser comprises: base materials 141, 161 formed of cupper, nickel and the like; and coating films 142, 162 formed on surfaces of the base materials 141, 161. The coating films 142, 162 are formed of platinum or platinum group metal other than platinum, or gold or an alloy thereof. The coating films 142, 162 are formed by an ion plating method or a plasma CVD method.SELECTED DRAWING: Figure 2