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METHOD FOR PRODUCING Iron Boride Material, and Iron Boride Thin Film Material
METHOD FOR PRODUCING Iron Boride Material, and Iron Boride Thin Film Material
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机译:硼化铁材料和硼化铁薄膜材料的制造方法
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摘要
To provide a method for producing an iron boride material having a high saturation magnetization and an iron boride thin film material having a high saturation magnetization.A step of preparing a base material made of amorphous iron boride containing boron at a concentration of 5 atomic% or more and less than 15 atomic%, a step of preparing a base material made of amorphous iron boride, A covering step of forming a covering member by forming a covering member on a surface of the base material, and performing a heat treatment at a temperature of 200 C. or more and less than 300 C. in an atmosphere not reacting with tantalum or in a reduced pressure atmosphere to partially cover boron in the base material And a heat treatment step of diffusing the iron boride material into the coating film to obtain a crystalline iron boride material.Selection drawing None
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