首页>
外国专利>
LANTHANUM PRECURSORS FOR DEPOSITION OF LANTHANUM, LANTHANUM OXIDE AND LANTHANUM NITRIDE FILMS
LANTHANUM PRECURSORS FOR DEPOSITION OF LANTHANUM, LANTHANUM OXIDE AND LANTHANUM NITRIDE FILMS
展开▼
机译:用于沉积镧,氧化镧和氮化氮化膜的镧前体
展开▼
页面导航
摘要
著录项
相似文献
摘要
Metal coordination complexes comprising a metal atom coordinated to at least one aza-allyl ligand having the structure represented by formula (I) where each R1-R4 are independently selected from the group consisting of H, branched or unbranched C1-C6 alkyl, branched or unbranched C1-C6 alkenyl, branched or unbranched C1-C6 alkynyl, cycloalkyl groups having in the range of 1 to 6 carbon atoms, silyl groups and halogens. Methods of depositing a film using the metal coordination complex and a suitable reactant are also described.
展开▼