- - PHOTODIODE AND OTHER SENSOR STRUCTURES IN FLAT-PANEL X-RAY IMAGERS AND METHOD FOR IMPROVING TOPOLOGICAL UNIFORMITY OF THE PHOTODIODE AND OTHER SENSOR STRUCTURES IN FLAT-PANEL X-RAY IMAGERS BASED ON THIN-FILM ELECTRONICS

摘要

A scintillation layer configured to emit photons when interacting with ionizing radiation and a photon-transmissive second electrode disposed in close proximity to the first electrode, the photosensitive layer, and the scintillation layer, A radiation sensor comprising a photodetector. The photosensitive layer is configured to generate electron-hole pairs when interacting with a portion of the photons. The radiation sensor comprises a pixel circuit electrically connected to the first electrode and configured to measure an imaging signal indicative of an electron-hole pair generated in the photosensitive layer, and a pixel circuit arranged on the pixel circuit such that the first electrode is on a plane including the pixel circuit. And a planarization layer disposed between the first electrode and the pixel circuit. The surface of at least one of the first electrode and the second electrode at least partially overlaps the pixel circuit and has a surface inflection over the feature of the pixel circuit. The surface curvature has a radius of curvature of more than 1/2 micrometer.