Method of manufacturing photomask using the same computer readable media including a sequence of programmed instructions stored thereon for implementing the same and mask imaging system

摘要

this invention is to prevent the flow of the pattern, the photo mask can be formed by the method. this is the part of the photo mask caused by the method are provided, the design pattern of the design pattern in the use of the pattern in the pattern formation of the stage; the relationship is difficult to calculate the output power; and the standard, the the model of the evaluation of whether the includes.