OCD NUMERICAL APERTURE INTEGRATION IN RALEIGH WAVELENGTHS FOR OPTICAL CRITICAL DIMENSIONOCD METROLOGY

摘要

the numerical aperture is different from the agent's decision to take according to the method of the intensity distribution of a number of technology integration is provided. there is a special time in the opening space of the existing wood deviation effect consider the weighted value and the set point (node), we use the site (on site) to perform the method.the dog is the ute deviation condition is satisfied by the people of the area to be able to. each area is then the value of integration and the increase of the area to contribute to the integration of the estimated value. in the alternative, the dog in the room, there is the wood. the deviation of the results of the analysis of the polynomial function is a common integration site (on site), the implementation of the law.analysis of the polynomial function to fit the nodes is generated, and then the distribution function used for the integration.