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BLAZED DIFFRACTION GRATING AND METHOD FOR MANUFACTURING BLAZED DIFFRACTION GRATING

机译:闪耀衍射光栅和制造闪耀衍射光栅的方法

摘要

An object is to provide a blazed diffraction grating having a smaller blaze angle than an existing blaze angle, and a method for producing the same. A method for producing a blazed diffraction grating includes the steps of forming a resin layer on a support having a saw-tooth sectional shape and having a surface on which a basic blaze surface and a basic riser surface are arranged alternately and repeatedly in a direction, such that the thickness of the resin layer contacting with the surface monotonically changes in the direction, and forming a metal coating film covering the resin layer surface. The method for monotonically changes the thickness comes in a formation method by difference in volatilization volume after applying a solvent resin on the support, and a formation method by a centrifugal force.
机译:一个目的是提供一种具有比现有的闪耀角小的闪耀角的闪耀衍射光栅及其制造方法。闪耀衍射光栅的制造方法包括以下步骤:在具有锯齿形截面形状的支撑体上形成树脂层,该支撑体的表面在一个方向上交替且重复地布置有基本的闪耀表面和基本的竖立表面,因此,与表面接触的树脂层的厚度沿方向单调变化,并形成覆盖树脂层表面的金属涂膜。用于单调改变厚度的方法是通过在将溶剂树脂施加到载体上之后的挥发量的差异的形成方法和通过离心力的形成方法。

著录项

  • 公开/公告号EP3056929B1

    专利类型

  • 公开/公告日2019-09-18

    原文格式PDF

  • 申请/专利权人 SHIMADZU CORPORATION;

    申请/专利号EP13895200.7

  • 发明设计人 SASAI HIROYUKI;

    申请日2013-10-07

  • 分类号G02B5/18;

  • 国家 EP

  • 入库时间 2022-08-21 12:31:41

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