SUBSTRATE LOCAL COOLING DEVICE, DEVICE FOR CONTROLLING END PORTION FILM THICKNESS OF FLUIDIZED MATERIAL OF SUBSTRATE IMPARTED WITH THE FLUIDIZED MATERIAL, DEVICE FOR COATING FLUIDIZED MATERIAL, DEVICE FOR DRYING FLUIDIZED MATERIAL IMPARTED ON SUBSTRATE AND METHOD FOR CONTROLLING END PORTION FILM THICKNESS OF FLUIDIZED MATERIAL

摘要

To reduce parts with uneven end portion film thickness of a fluidized material that is imparted to a substrate to enlarge the effective area thereof.SOLUTION: In a substrate imparted with a fluidized material, means for cooling an end portion of the fluidized material of a substrate imparted with the fluidized material to temperature lower than the temperature around thereof cools the end portion to a predetermined temperature.SELECTED DRAWING: Figure 1