PRODUCTION METHOD OF SiC-COATED SILICEOUS MATERIAL, AND SiC-COATED SILICEOUS MATERIAL

摘要

To provide a production method of a SiC-coated siliceous material capable of forming a strong CVD-SiC coating on a silicon or siliceous substrate.SOLUTION: A production method of a SiC-coated siliceous material comprises the first membrane production step for coating a siliceous substrate with the first SiC layer at a temperature of 1,150°C or lower, and the second membrane production step for coating the siliceous substrate with the second SiC layer by a CVD method at a temperature of 1,200-1,400°C.SELECTED DRAWING: Figure 2