スタイラス及び表面形状測定装置

摘要

To provide a surface shape measurement device capable of performing a contour shape measurement and a surface roughness measurement without complicating the device.SOLUTION: A measurement unit 10 of a surface shape measurement device 1 includes: a stylus 14; a displacement measurement portion 24 for measuring the displacement of the stylus 14; and a measuring force change portion 26 for changing the measuring force. The stylus 14 includes a first needle 20 and a second needle 22 that project to the sides of a stylus body 18, respectively, and the curvature radius of the tip of the second needle 22 is larger than that of the tip of the first needle 20. The measuring force change portion 26 sets the measuring force to a fine first measuring force when the first needle 20 performs the measurement, or sets the measuring force to a second measuring force larger than the first measuring force when the second needle 22 performs the measurement.SELECTED DRAWING: Figure 2