Equipment for moving and positioning optical elements with nanometer mechanical stability and resolution in a synchrotron light source beamline

摘要

An apparatus for moving and positioning an optical element within a beam line comprises an attachment structure (2) to which one (or a plurality) of optical elements (3) are attached and a reference structure (1). ) Is attached directly or indirectly. The mounting structure (2) is moved by low mechanical rigidity moving means (4) and its position relative to the reference structure (1) is measured with high resolution via the position measuring means (6). The device further comprises a balance mass (5) for receiving a force reaction exerted by the moving means (4) of the mounting structure (2). The interconnection of the structural elements is effected by elastic means (l1 and l2) having specific stiffness characteristics so that the position control is performed in a closed loop with a bandwidth exceeding 100 Hz. This apparatus is applicable to positioning of a double crystal monochromator for synchrotron radiation. [Selection] Figure 4 (c)