首页> 外国专利> INSTRUMENT FOR MOVING AND POSITIONING OF OPTICAL ELEMENTS WITH NANOMETRIC MECHANICAL STABILITY AND RESOLUTION IN SYNCHROTON LIGHT SOURCE BEAMLINES

INSTRUMENT FOR MOVING AND POSITIONING OF OPTICAL ELEMENTS WITH NANOMETRIC MECHANICAL STABILITY AND RESOLUTION IN SYNCHROTON LIGHT SOURCE BEAMLINES

机译:同步光源光束中具有纳米机械稳定性和分辨率的光学元件的移动和定位仪器

摘要

An instrument for moving and positioning of an optical element in beamlines comprises a mounting structure to which one (or more) optical element(s) is mounted, as well as a reference structure, in relation to which the mounting structure is moved by means of a moving means of low (or close to zero) mechanical stiffness and in relation to which the position of the mounting structure is metered by means of a high-resolution interferometer. The invention proposes that the instrument also comprises a balance mass for receiving the reaction force from the moving means of the mounting structure, and both the mounting structure and the balance mass are attached to the reference structure by spring means, with specific stiffness properties, allowing the positioning control of the mounting structure to be done by a control system with main feedback loop with high bandwidth (100 Hz). In order to allow for a broader range of movement between the mounting structure and the reference structure, by means of a cascaded movement, the instrument may further comprise an intermediate structure attached to the reference structure, also preferably by spring means with specific stiffness properties, the complementary structure receiving the mounting structure and the balance mass in place of the reference structure. Such an instrument may be embodied in a new-generation synchrotron light source beamline mounted double-crystal monochromator, being sufficient for this that the spring means to be conveniently chosen, the reference structure to have a main rotation in relation to the incident beam, and in addition to the crystal mounted to the mounting structure, a complementary crystal to be mounted to the complementary mounting structure rigidly attached to the reference structure.
机译:一种用于在束线中移动和定位光学元件的仪器,包括一个(一个或多个)光学元件安装到其上的安装结构,以及一个参考结构,通过该参考结构相对于该安装结构移动具有低(或接近零)机械刚度的移动装置,相对于该移动装置,借助于高分辨率干涉仪对安装结构的位置进行计量。本发明提出,器械还包括用于接收来自安装结构的移动装置的反作用力的平衡质量,并且安装结构和平衡质量均通过具有特定刚度特性的弹簧装置而附接到参考结构。安装结构的定位控制将由具有高带宽(> 100 Hz)的主反馈回路的控制系统完成。为了允许在安装结构和参考结构之间的移动范围更大,借助于级联运动,器械可以进一步包括附接到参考结构上的中间结构,还优选地通过具有特定刚度特性的弹簧装置,补充结构代替参考结构而接收安装结构和平衡质量。这样的仪器可以体现在安装有新一代同步加速器光源光束线的双晶体单色仪中,这足以使弹簧装置易于选择,参考结构相对于入射光束具有主旋转,并且除了将晶体安装到安装结构上之外,还将将要安装到刚性安装到参考结构的互补安装结构上的互补晶体。

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