PROCESSING METHOD OF PRESSURE-SENSITIVE ADHESIVE TAPE AND PRESSURE-SENSITIVE ADHESIVE TAPE STICKING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a processing method of pressure-sensitive adhesive tape and a pressure-sensitive adhesive tape sticking device which facilitates removal work of a pressure-sensitive adhesive tape from a winding roller, and reduces man hours required for the disposal work of the pressure-sensitive adhesive tape from the winding roller.;SOLUTION: A pressure-sensitive adhesive tape sticking device includes a chuck table 11, a support roller 21 for supporting a sheet roll 14A around which a sheet roll 14A laminating a pressure-sensitive adhesive tape 12 and a separate paper 13 is wound, transportation rollers 22, 23 for feeding the pressure-sensitive adhesive tape 12 from the sheet roll 14A and transporting, a clip unit 30 for clipping a needed area 12A being stuck to a wafer 100 from the fed-out pressure-sensitive adhesive tape 12, and a winding unit 27 for winding the unnecessary region 12B left after clipping. The winding unit 27 includes a winding roller 28 extending in the rotational axis direction, and a spiral tube 29 adhering to the winding roller 28 when applied to the outer peripheral surface 28A of the winding roller 28, and having the bore diameter slidable in the rotational axis direction of winding roller 28.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT