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METHOD OF VERIFYING FAULT OF INSPECTION UNIT, INSPECTION APPARATUS AND INSPECTION SYSTEM
METHOD OF VERIFYING FAULT OF INSPECTION UNIT, INSPECTION APPARATUS AND INSPECTION SYSTEM
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机译:检验单元故障的检验方法,检验装置及检验系统
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摘要
A method of verifying a fault of an inspection unit, an inspection apparatus, and an inspection system are disclosed. The method according to the present disclosure includes: providing a verification reference body which is formed on a frame attached to an inspection system; placing the inspection unit on the verification reference body; obtaining image data of the verification reference body through the inspection unit; verifying a fault of the inspection unit by extracting a movement error and height error of the inspection unit from the image data; and generating a verification result indicating the fault of the inspection unit.
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