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METHOD AND SYSTEM FOR CONTROLLING LOT RISK SCORE BASED DYNAMIC LOT MEASUREMENT ON BASIS OF EQUIPMENT RELIABILITY INDEX
METHOD AND SYSTEM FOR CONTROLLING LOT RISK SCORE BASED DYNAMIC LOT MEASUREMENT ON BASIS OF EQUIPMENT RELIABILITY INDEX
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机译:基于设备可靠性指标的基于批量风险得分的动态批量测量控制方法和系统
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摘要
A method and a system for controlling a lot risk score based dynamic lot measurement on the basis of equipment reliability index are provided. The method for controlling a measurement, according to an embodiment of the present invention, calculates an equipment reliability index of specific equipment for a specific process in semiconductor manufacturing, calculates a risk score of the specific equipment for the specific process on the basis of an equipment reliability index, and determines, on the basis of the risk score, whether to measure a semiconductor product processed by the specific equipment for the specific process. Therefore, differential quality monitoring and management is possible according to the equipment reliability index, a measuring instrument can be efficiently used, quality and yield can be improved through timely measurement, and management convenience can be increased through automatic and dynamic lot measurement control.
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