Lot Lot Dynamic Lot Measurement Control Method and System based on Lot Risk Score according to Equipment Reliability Index

摘要

A dynamic lot measurement control method and system based on lot risk score based on equipment reliability index is provided. In the measurement control method according to an exemplary embodiment of the present invention, an equipment reliability index of a specific equipment for a specific process in semiconductor manufacturing is calculated, and a risk score of a specific equipment for a specific process is calculated based on the equipment reliability index. Based on the determination of whether to measure the processed semiconductor product in a particular equipment for a particular process. This enables differential quality monitoring / management according to the equipment reliability index, enabling the efficient use of the instrument, improving quality / yield through timely measurement, and controlling the management through automatic / dynamic lot measurement control. Convenience can be increased.