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BAW RESONATOR WITH IMPROVED COUPLING, RF FILTER COMPRISING A BAW RESONATOR AND METHOD OF MANUFACTURING A BAW RESONATOR
BAW RESONATOR WITH IMPROVED COUPLING, RF FILTER COMPRISING A BAW RESONATOR AND METHOD OF MANUFACTURING A BAW RESONATOR
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机译:具有改进的耦合的鲍鱼谐振器,包括鲍鱼谐振器的RF滤波器和制造鲍鱼谐振器的方法
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摘要
An improved BAW resonator with an increased electroacoustic coupling is provided. The resonator has a monocrystalline piezoelectric material (MCPM) obtained by layer transfer of LN, LT or quartz between a bottom electrode (BE) and a top electrode (TE).
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