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An improved coupling BAW resonator, RF filter comprising a BAW resonator, and methods of fabricating a BAW resonator
An improved coupling BAW resonator, RF filter comprising a BAW resonator, and methods of fabricating a BAW resonator
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机译:改进的耦合BAW谐振器,包括BAW谐振器的RF滤波器以及制造BAW谐振器的方法
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摘要
An improved BAW resonator with increased electro-acoustic coupling is provided. The resonator comprises a monocrystalline piezoelectric material between a lower electrode and an upper electrode.
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