SYSTEM AND METHOD FOR KEY PARAMETER IDENTIFICATION PROCESS MODEL CALIBRATION AND VARIABILITY ANALYSIS IN A VIRTUAL SEMICONDUCTOR DEVICE FABRICATION ENVIRONMENT

摘要

The present invention relates to a non-transitory computer-readable medium having computer-executable instructions for key parameter identification in a virtual semiconductor manufacturing environment, which provides the visualization of complex correlation between a process sequence and 2D design data. According to the present invention, instructions allow at least one computing device, on execution, to receive a process sequence, perform a plurality of virtual manufacturing runs, receive user identification of one or more targets, execute an analysis module in a virtual manufacturing environment, receive user selection received through a user interface, perform regression analysis on measurement data, identify one or more key parameters, and display or export identification of the identified key parameters.