SEMICONDUCTOR DEFECT CLASSIFICATION DEVICE METHOD FOR CLASSIFYING DEFECT OF SEMICONDUCTOR AND SEMICONDUCTOR DEFECT CLASSIFICATION SYSTEM

摘要

The present invention relates to a semiconductor defect classifying apparatus. The semiconductor defect classifying apparatus of the present invention includes: property extractors receiving images of semiconductor patterns on a wafer and extracting image properties from the images; and a classifier receiving first meta information with respect to the image properties and the wafer and classifying defects of the semiconductor patterns related to the images based on machine learning in accordance with the image properties and the first meta information.