MANUFACTURING METHOD OF METAL CLUSTER ION WITH DISCONTINUOUS SIZE DISTRIBUTION AND METAL CLUSTER ION FOR THE SAME

摘要

The present invention relates to a technique using a cluster ion beam, the method of producing a cluster ion having a discontinuous size distribution according to an aspect of the present invention, preparing a target comprising a metal particle or a metal thin film; And a bismuth-ion irradiating to form a metal cluster ions having a discontinuous size distribution a (Bi ⁺₃₎ beam to the metal particles or the metal thin film of the target; includes.