Interface evaluation method of crystal growth layer by microscopic photoresponse method

摘要

PROBLEM TO BE SOLVED: To obtain higher technology for evaluating crystals by use of a microscopic photo-response method and to evaluate different physical phenomena on an interface.SOLUTION: When the presence of at least two barrier wall heights is determined in a photo-response spectrum obtained by irradiating an interface with laser light, the interface is irradiated with a laser beam I having photon energy hν1 and a laser beam II having photon energy hν2. These laser beams are selected in such a manner that, by using a variation point (hνs) where a photoyield (Y) varies by each barrier wall height (qφ, qφ,...), the photon energy hν1 satisfies hνshν1hνb and the photon energy hν2 satisfies hνbhν2hνp, where hνb represents an initiation point of basic absorption and hνp represents a peak value of the photoyield Y. While the interface is scanned with each of the laser beams I, II, a two-dimensional distribution of the photoyield Y and/or a photocurrent image on the interface are obtained for each of the laser beams I, II.SELECTED DRAWING: Figure 4