MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS

摘要

A micromirror comprising a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis. A first comb drive with a first portion fixed relative to the mirror and a second portion fixed relative to the mount, and the first comb drive are adapted to actuate the mirror about the first axis. A first support structure pivotally attached to the mount by a second pivoting structure that permits pivotal movement of the mount relative to the first support structure about a second axis, and the second axis is non-parallel to the first axis. A second comb drive with a first portion fixed relative to the mount and a second portion fixed relative to the first support structure, and the second comb drive is adapted to actuate the mount about the second axis.