COMPOSITION FOR UNDERLAYER FILM FORMATION, UNDERLAYER FILM FOR DIRECTED SELF-ASSEMBLED FILM AND FORMING METHOD THEREOF, AND DIRECTED SELF-ASSEMBLY LITHOGRAPHY PROCESS

摘要

A composition includes a polymer and a solvent. The polymer (A) satisfies at least one of the conditions (i) and (ii): (i) having in one terminal part of a main chain a block of a first structural unit that includes an amino group; and (ii) having a sulfur atom bonding to one end of the main chain, wherein a monovalent group that includes an amino group bonds to the sulfur atom.