OBJECT POSITIONER, METHOD FOR CORRECTING THE SHAPE OF AN OBJECT, LITHOGRAPHIIC APPARATUS, OBJECT INSPECTION APPARATUS, DEVICE MANUFACTURING METHOD

摘要

The invention provides an object positioner comprising: - an object support having an object support surface which is configured to engage at least a part of an object, said object support surface having a support surface temperature, - a thermal device, Which thermal device is configured to provide at least a part of the object With a first object temperature, Which first object temperature differs from the support surface temperature by a first predetermined temperature difference.