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MEMS MEMS METHOD FOR MANUFACTURING MEMS CAPACITIVE MICROPHONE AND THE MEMS CAPACITIVE MICROPHONE MANUFACTURED BY THE METHOD
MEMS MEMS METHOD FOR MANUFACTURING MEMS CAPACITIVE MICROPHONE AND THE MEMS CAPACITIVE MICROPHONE MANUFACTURED BY THE METHOD
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机译:一种制造MEMS电容式麦克风的MEMS方法及由该方法制造的MEMS电容式麦克风
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摘要
The present invention relates to a method for manufacturing a MEMS capacitive microphone and a MEMS capacitive microphone manufactured by the same. According to the present invention, a movable comb finger attached to a diaphragm and a fixed comb finger attached to a support are automatically aligned to enlarge a sensing area and make a gap between the movable comb finger and the fixed comb finger small and uniform. Therefore, the MEMS capacitive microphone with a high signal-to-noise ratio can be realized.
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