A METHOD OF MANUFACTURING A MEMS CAPACITOR MICROPHONE, SUCH A MEMS CAPACITOR MICROPHONE, A STACK OF FOILS COMPRISING SUCH A MEMS CAPACITOR MICROPHONE, AN ELECTRONIC DEVICE COMPRISING SUCH A MEMS CAPACITOR MICROPHONE AND USE OF THE ELECTRONIC DEVICE

摘要

The invention relates to a method of manufacturing a MEMS capacitor microphone and further to such MEMS capacitor microphone. With the method a MEMS capacitor microphone can be manufactured by stacking pre-processed foils ( 10 ) having a conductive layer ( 11 a, 11 b) on at least one side. After stacking, the foils ( 10 ) are sealed, using pressure and heat. Finally the MEMS capacitor microphones are separated from the stack (S). The pre-processing of the foils (preferably done by means of a laser beam) comprises a selection of the following steps: (A) leaving the foil intact, (B) locally removing the conductive layer, (C) removing the conductive layer and partially evaporating the foil ( 10 ), and (D) removing both the conductive layer as well as foil ( 10 ), thus making holes in the foil ( 10 ). In combination with said stacking, it is possible to create cavities and membranes. This opens up the possibility of manufacturing MEMS capacitor microphone.