Apparatus for transferring substrate Method for transferring substrate and Apparatus for processing substrate having the same

摘要

The substrate transfer apparatus according to the exemplary embodiments may include a floating stage, a transfer unit, and a contact aid. The floating stage may be provided with an air hole for injecting air toward the back surface of the substrate to float the substrate. The transfer unit may be provided with a transfer roller to rotate in contact with the back surface of the substrate entering the floating stage to transfer the substrate along the floating stage. The contact assistant may be provided to assist the contact when the substrate back surface is in contact with the transfer roller.