Output and Operating Status Detection Device of ESDElectro Static Discharge Tester

摘要

The present invention can detect the presence or absence of the output voltage of the electrostatic tester and the abnormality of the charging and discharging operation at the same time, an output and charging or discharging operation state detection device of the electrostatic tester that can easily determine the cause of the abnormality when an abnormal state occurs It is to provide. Such an output and operation state detection apparatus of the electrostatic tester according to the present invention, the high voltage generator 110 for generating a predetermined high voltage, and the control circuit unit 120 for controlling the operation of the high voltage generator 110 in accordance with the user''s operation A main system 100 having a); Charge and discharge elements connected in parallel to the high voltage generator 110 of the main system 100 to charge or discharge the high voltage output from the high voltage generator 110 in a predetermined first charging time or first discharge time unit ( 210; A high voltage charge control unit 220 connected between the high voltage generator 110 and the charge / discharge device 210 to switch the charging operation of the charge / discharge device 210 in the first charging time unit; High voltage charge and discharge connected to the output terminal of the charge, discharge device 210 in parallel, and having a high voltage discharge control unit 230 for switching the discharge operation of the charge, discharge device 210 in the unit of the first discharge time A controller 200; The output and state detection unit 400 detects the presence or absence of a voltage across both ends of the charge / discharge device 210 and transmits the voltage value to the control circuit unit 120 of the main system 100.